Fabrication of Micro Structures using Thin Film Metallic Glass. Proposal and Fabrication of a Micro Electrostatic Actuator of Thin Film Metallic Glass.
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چکیده
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2000
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.66.287